JPH0546660B2 - - Google Patents

Info

Publication number
JPH0546660B2
JPH0546660B2 JP62007745A JP774587A JPH0546660B2 JP H0546660 B2 JPH0546660 B2 JP H0546660B2 JP 62007745 A JP62007745 A JP 62007745A JP 774587 A JP774587 A JP 774587A JP H0546660 B2 JPH0546660 B2 JP H0546660B2
Authority
JP
Japan
Prior art keywords
charged particle
potential
metal cylinder
charged particles
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62007745A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63175325A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP62007745A priority Critical patent/JPS63175325A/ja
Publication of JPS63175325A publication Critical patent/JPS63175325A/ja
Publication of JPH0546660B2 publication Critical patent/JPH0546660B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP62007745A 1987-01-16 1987-01-16 荷電粒子検出装置 Granted JPS63175325A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62007745A JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62007745A JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Publications (2)

Publication Number Publication Date
JPS63175325A JPS63175325A (ja) 1988-07-19
JPH0546660B2 true JPH0546660B2 (en]) 1993-07-14

Family

ID=11674235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62007745A Granted JPS63175325A (ja) 1987-01-16 1987-01-16 荷電粒子検出装置

Country Status (1)

Country Link
JP (1) JPS63175325A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4092280B2 (ja) 2003-10-23 2008-05-28 株式会社東芝 荷電ビーム装置および荷電粒子検出方法
EP1619495A1 (en) 2004-07-23 2006-01-25 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and Apparatus for inspecting a specimen surface and use of fluorescent materials
JP2008140723A (ja) * 2006-12-05 2008-06-19 Horiba Ltd 分析装置

Also Published As

Publication number Publication date
JPS63175325A (ja) 1988-07-19

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